Muaj ntau yam txwv tsis pub tsim lub tshuab nqus tsev plating hauv Suav teb, tshwj xeeb tshaj yog kev ua cov tantalum thiab cov khoom ua los ntawm tantalum, cov khoom siv tseem ceeb siv rau kev tsim cov evaporation ntawm cov tshuab plating.Tantalum thiab tantalum alloysyog tsim rau kev tsim cov khoom txhawb nqa, cov cua sov, thiab cov ntaub thaiv cua sov hauv cov khoom siv lub tshuab nqus tsev vim lawv qhov siab melting point, zoo stability, thiab tsis tshua muaj zog siab ntawm qhov kub thiab txias. Tam sim no, ob peb lub tuam txhab lag luam koom nrog hauv kev tsim cov tantalum qhov chaw rau lub tshuab nqus tsev vacuum, uas ua rau muaj kev cuam tshuam hnyav rau kev xa khoom ntawm tantalum qhov chaw rau lub tshuab nqus tsev vacuum, thiab muaj ntau yam teeb meem hauv kev tsim thiab tsim cov tantalum qhov chaw rau lub tshuab nqus tsev vacuum hauv Suav teb.
Resistance cua sov feem ntau yog siv los ua qhov chaw evaporation rau cov ntaub ntawv uas muaj evaporation kub ntawm 1 000 ~ 2 000 C. Feem ntau, nws yuav tsum tau hais tias lub melting point ntawm evaporation qhov chaw cov ntaub ntawv yog hais txog 1000 C siab tshaj qhov evaporation. Ua hauj lwm kub, qhov sib npaug ntawm chav siab yog tsawg, lub brittleness tom qab high-temperature txias yog me me, thiab nws muaj zoo tshuaj stability nyob rau hauv lub tshuab nqus tsev ib puag ncig. Yog li ntawd, tantalum yog ib qho khoom siv rau lub tshuab nqus tsev vacuum.
Tantalum yog lub teeb grey hlau nrog cov xim xiav me ntsis thiab qhov ntom ntom (16.5) × 103 kg / m3), siab melting point (2 996} C), qis coefficient ntawm linear expansion (6.5 ntawm 0 thiab 100 C) × 10-6 K-1), ductile, tougher dua tooj liab, txias kos rau hauv nplua hlau los yog ntawv ci. Lub thermal conductivity ntawm tantalum ntawm 300K yog 52.1W (m K) -1 thiab elastic modulus yog 192 × 103 MPa ntawm chav tsev kub.
Cov ntsiab lus tantalum ntawm Ta1 yog ntau tshaj 90.35 feem pua; Ta2 muaj ntau dua 79.50% tantalum. Txawm li cas los xij, purity ntawm tantalum yog ntau tshaj 99.95 feem pua rau cov tshuab nqus tsev vacuum plating thiab 99.99 feem pua rau high-end OLED plating tshuab. Pom tseeb, cov kev cai yooj yim ntawm tantalum rau lub tshuab nqus tsev plating tsis tuaj yeem ua tau raws li kev siv cov khoom lag luam thiab cov qauv uas twb muaj lawm. Kev tsim khoom ntawm high-purity tantalum tau dhau los ua qhov tseem ceeb ntawm kev txwv qhov chaw ntawm tantalum qhov chaw rau lub tshuab nqus tsev plating.
Qhov qis melting point ntawm lwm yam hlau ntsiab (xws li Fe, Ni, thiab lwm yam) los yog siab equilibrium vapor siab (xws li W), los yog tsis tshua muaj stability (Ti) nyob rau hauv tantalum khoom. Thaum cov khoom siv tsis zoo tantalum evaporates ntawm qhov kub thiab txias, lwm yam hlau yuav decompose thiab evaporate los yog hnov mob nrog lwm cov molecules nyob rau hauv lub evaporation chamber, uas ua rau cov zaj duab xis Cheebtsam deviating los ntawm evaporator khoom Cheebtsam. Yog li ntawd, lub tshuab nqus tsev vacuum ntawm high-purity tantalum qhov chaw tuaj yeem txo cov pa phem ntawm cov khoom siv evaporation rau txheej txheej.
