Titanium sputtering phiajxa mus rau cov neeg siv khoom thaum Lub Kaum Ob Hlis 13th
Khoom npe Titanium puag ncig lub hom phiaj
Qib Gr1 Gr2 Gr3 Gr5 (Ti6al4v)
Standard titanium hom phiaj: kev ua haujlwm: ua raws li ASTM B34897
Titanium phaj phiaj: kev ua haujlwm: ua raws li ASTM B265-93
Specification: 60/65/95/100 * 30/32/40/45mm
Phaj phiaj: (8-25mm * (150-300) mm * (1000-2500) mm
Tube phiaj: 70mm * 7mm / 10mm
Nto polishing tuaj yeem threaded
Nta: Lub teeb yuag, zoo heev corrosion kuj, corrosion kuj, siab zog, zoo tshav kub tsis kam, zoo ductility, non-toxic, non-magnetic, zoo heev mechanical zog, thiab lwm yam.
Lub xeev Annealing xeev (M) Kub ua hauj lwm xeev (R) Cold ua hauj lwm xeev (Y) (annealing, ultrasonic flaw detection)
Daim ntaub ntawv: Siv nyob rau hauv semiconductor sib cais li, vaj huam sib luag tiaj tus, cia electrode films, sputtering txheej, workpiece nto txheej, iav txheej kev lag luam
Purity yog ib qho tseem ceeb ntawm kev ua tau zoo ntawm titanium lub hom phiaj vim hais tias qhov purity ntawm lub hom phiaj muaj kev cuam tshuam zoo rau kev ua haujlwm ntawm cov yeeb yaj kiab. Txawm li cas los xij, hauv kev siv tswv yim, qhov yuav tsum tau ua rau purity ntawm lub hom phiaj kuj txawv. Silicon chips tam sim no muaj qhov loj ntawm 6 ntiv mus rau 8 ntiv tes mus rau 12 ntiv tes, thiab cov kab dav dav tau poob qis los ntawm 0.5 um mus rau 0.25 um, 0.18 um, lossis txawm tias 0.13 um, ua tsaug rau kev lag luam microelectronics txoj kev vam meej sai. Yav dhau los, 99.995 feem pua ntawm lub hom phiaj purity tuaj yeem ua tau raws li cov txheej txheem ntawm 0.35 um IC, thaum 99.999 feem pua lossis txawm 99.9999 feem pua ntawm lub hom phiaj purity yog xav tau rau kev npaj ntawm 0.18 um kab .
Lub hauv paus ntawm cov pa phem rau cov yeeb yaj kiab tso tawm yog impurities hauv lub hom phiaj khoom thiab cov pa oxygen thiab dej vapor hauv qhov pores. Cov ntaub ntawv sib txawv muaj cov kev xav tau sib txawv rau cov ntsiab lus impurity sib txawv. Piv txwv li, ntshiab aluminium thiab aluminium alloy lub hom phiaj siv nyob rau hauv kev lag luam semiconductor muaj cov cai tshwj xeeb rau cov ntsiab lus ntawm alkali hlau thiab cov ntsiab lus ntawm cov khoom siv hluav taws xob.
Lub hom phiaj feem ntau yuav tsum muaj qhov ntom ntom kom txo cov porosity hauv lub hom phiaj khoom thiab txhim khu kev ua tau zoo ntawm cov zaj duab xis sputtered. Cov yam ntxwv hluav taws xob thiab kho qhov muag ntawm cov yeeb yaj kiab kuj raug cuam tshuam los ntawm lub hom phiaj ceev ntxiv rau qhov sputtering tus nqi. Cov yeeb yaj kiab ua tau zoo dua qhov ntau dua lub hom phiaj ceev. Tsis tas li ntawd, lub hom phiaj tuaj yeem muaj sia nyob ntawm kev ntxhov siab thaum lub sij hawm sputtering zoo dua los ntawm kev ua kom denser thiab muaj zog dua. Qhov ceev kuj yog ib qho ntawm cov kev ua haujlwm tseem ceeb ntawm lub hom phiaj.
