Muaj ntau hom sputtering lub hom phiaj nrog siab purity siab, thiab lawv kuj tau siv dav hauv kev lag luam. Niaj hnub no, peb yuav tham txog plaub hom sputtering lub hom phiaj uas feem ntau siv nyob rau hauv plaub qhov loj: high-purity txhuas lub hom phiaj, titanium lub hom phiaj, tantalum lub hom phiaj, thiab tungsten titanium lub hom phiaj. Lawv npog thaj chaw ntawm vaj huam sib luag tiaj tus, semiconductors, cia, thiab hnub ci hlwb.
Aluminium phiaj (Tshuag purity 99.99 feem pua - 99.999 feem pua)
High-purity aluminium thiab nws cov alloys yog ib qho ntawm cov khoom siv ua yeeb yaj kiab dav siv. Nyob rau hauv nws daim ntawv thov teb, fabrication ntawm VLSI chips yuav tsum tau ib tug heev purity ntawm sputtering lub hom phiaj hlau, feem ntau yog siab li 99.9995 feem pua, thaum lub hlau purity ntawm lub tiaj vaj huam sib luag qhia thiab hnub ci hlwb yog me ntsis qis.
Titanium phiaj (Tshuag purity 99.99 feem pua - 99.999 feem pua)
Titanium yog ib qho ntawm cov khoom siv yeeb yaj kiab uas feem ntau siv hauv VLSI chips (cov khoom siv txheej txheej txheej yog txhuas). Lub hom phiaj titanium yuav raug siv ua ke nrog lub nplhaib titanium hauv cov txheej txheem ua ntej-chip. Lub luag haujlwm tseem ceeb yog los pab cov txheej txheem sputtering ntawm titanium lub hom phiaj, uas yog siv los ntawm VLSI chip manufacturing.
Tantalum lub hom phiaj (cov khoom muag purity 99 feem pua, 99.5 feem pua, 99.9 feem pua, 99.995 feem pua, 99.99 feem pua, 99.995 feem pua, 99.999 feem pua)
Nrog rau kev loj hlob tawg ntawm kev thov rau cov neeg siv khoom siv hluav taws xob xws li smartphones thiab ntsiav tshuaj, qhov kev thov rau high-end chips tau nce ntau, thiab tantalum tau dhau los ua cov peev txheej kub kub. Txawm li cas los xij, vim qhov tsis txaus ntawm cov peev txheej tantalum, high-purity tantalum lub hom phiaj yog kim thiab feem ntau yog siv nyob rau hauv loj-scale integrated circuits thiab lwm yam teb.
Titanium tungsten phiaj (99.95% purity hauv Tshuag)
Tungsten titanium alloy muaj tsawg electron txav, ruaj khov thermal mechanical zog, zoo corrosion kuj, thiab zoo tshuaj stability. Nyob rau hauv xyoo tas los no, tungsten titanium alloy sputtering lub hom phiaj tau siv los ua cov khoom sib txuas ntawm cov khoom siv hluav taws xob semiconductor nti grid circuits. Tsis tas li ntawd, hauv kev sib txuas hlau ntawm cov khoom siv semiconductor, tungsten thiab titanium lub hom phiaj tuaj yeem siv los ua cov txheej txheem thaiv. Nws yog siv nyob rau hauv high-temperature ib puag ncig, feem ntau yog rau VLSI thiab solar cells.
